A Gas-Sensitive SPIM Sensor for Detection of Ethanol Using SnO2 as Sensing Element

Mengyun Wang, Hoang A. Truong, Carl F. Werner, Ko ichiro Miyamoto, Tatsuo Yoshinobu

研究成果: Article査読

1 被引用数 (Scopus)

抄録

In this study, a gas-sensitive scanning photo-induced impedance microscopy (SPIM) sensor using tin dioxide (SnO2) as sensing element is proposed, which detects the local impedance change on the sensor surface in response to ethanol vapor. The impedance change of the SnO2 film is detected by monitoring the AC photocurrent signal induced by a laser beam. This measurement can be done in a spatially resolved manner by using a scanning laser beam and two-dimensional maps are obtained thanks to the light-addressability of SPIM. This technique is expected to be applied to the visualization of gas distributions on the sensing surface.

本文言語English
論文番号1800766
ジャーナルPhysica Status Solidi (A) Applications and Materials Science
216
12
DOI
出版ステータスPublished - 2019 6 19

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 電子工学および電気工学
  • 材料化学

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