A displacement sensor based on directional resonant photodetector

B. S. Choi, Y. Kanamori, K. Hane

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

We describe a micro-optical displacement encoder based on resonant photodetector with directional sensitivity for the specific incident angle. A layered silicon photodetector thinner than the incident wavelength is designed to confine the light beam for the effective encoder signal detection by guided resonant effect. Fabricated device shows the highly enhanced sensitivity at the angle illuminated from scale grating of encoder. The displacement signal with submicron resolution was achieved by the proposed resonant photodetector and simple optical configuration.

本文言語English
ホスト出版物のタイトルTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ2357-2360
ページ数4
DOI
出版ステータスPublished - 2007 12 1
イベント4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
継続期間: 2007 6 102007 6 14

出版物シリーズ

名前TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
国/地域France
CityLyon
Period07/6/1007/6/14

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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