@inproceedings{5c27804db3b04157965c66d0a3ec0590,
title = "A continuous single-crystal-silicon membrane deformable mirror using bimorph spring",
abstract = "We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm×1.8mm mirror membrane are fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.",
keywords = "Au-Si eutectic bonding, adaptive optics, bimorph spring, deformable mirror",
author = "Tong Wu and Takashi Sasaki and Masayuki Akiyama and Kazuhiro Hane",
year = "2013",
month = may,
day = "29",
doi = "10.1117/12.2002785",
language = "English",
isbn = "9780819493866",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "MEMS Adaptive Optics VII",
note = "MEMS Adaptive Optics VII ; Conference date: 05-02-2013 Through 07-02-2013",
}