A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

研究成果: Conference contribution

抄録

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm×1.8mm mirror membrane are fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

本文言語English
ホスト出版物のタイトルMEMS Adaptive Optics VII
DOI
出版ステータスPublished - 2013 5 29
イベントMEMS Adaptive Optics VII - San Francisco, CA, United States
継続期間: 2013 2 52013 2 7

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
8617
ISSN(印刷版)0277-786X

Other

OtherMEMS Adaptive Optics VII
CountryUnited States
CitySan Francisco, CA
Period13/2/513/2/7

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

フィンガープリント 「A continuous single-crystal-silicon membrane deformable mirror using bimorph spring」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル