TY - JOUR
T1 - A comparison of electromigration failure of metal lines with fracture mechanics
AU - Abé, Hiroyuki
AU - Muraoka, Mikio
AU - Sasagawa, Kazuhiko
AU - Saka, Masumi
PY - 2012/6
Y1 - 2012/6
N2 - Atoms constructing an interconnecting metal line in a semiconductor device are transported by electron flow in high density. This phenomenon is called electromigration, which may cause the line failure. In order to characterize the electromigration failure, a comparison study is carried out with some typical phenomena treated by fracture mechanics for thin and large structures. An example of thin structures, which have been treated by fracture mechanics, is silica optical fibers for communication systems. The damage growth in a metal line by electromigration is characterized in comparison with the crack growth in a silica optical fiber subjected to static fatigue. Also a brief comparison is made between the electromigration failure and some fracture phenomena in large structures.
AB - Atoms constructing an interconnecting metal line in a semiconductor device are transported by electron flow in high density. This phenomenon is called electromigration, which may cause the line failure. In order to characterize the electromigration failure, a comparison study is carried out with some typical phenomena treated by fracture mechanics for thin and large structures. An example of thin structures, which have been treated by fracture mechanics, is silica optical fibers for communication systems. The damage growth in a metal line by electromigration is characterized in comparison with the crack growth in a silica optical fiber subjected to static fatigue. Also a brief comparison is made between the electromigration failure and some fracture phenomena in large structures.
KW - Comparison
KW - Electromigration failure
KW - Fracture mechanics
KW - Interconnecting line
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U2 - 10.1007/s10409-012-0056-0
DO - 10.1007/s10409-012-0056-0
M3 - Article
AN - SCOPUS:84865516788
VL - 28
SP - 774
EP - 781
JO - Acta Mechanica Sinica/Lixue Xuebao
JF - Acta Mechanica Sinica/Lixue Xuebao
SN - 0567-7718
IS - 3
ER -