A 60×60μm2 size planar shielded loop probe for low lift-off on-chip magnetic near field measurements

Masahiro Yamaguchi, Sho Muroga, Shiori Nanba, Kaoru Arai, Kunio Yanagi, Yasushi Endo

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

A new Si on-chip planar shielded loop coil with 60 × 60 μm 2 window size has been developed for high special resolution magnetic near field measurements. The coil is located closely to the Si chip edge to lower the lift-off between the coil and a device-under-test (DUT) down to 10μm. The Si chip with the coil is mounted on a small PCB substrate to complete a magnetic near field probe. Then the probe is set on a newly developed 3-D scanner, consisting of an in-plane stage to move around the DUT with positioning accuracy of 10 μm, and a vertical stage to hold the probe with yaw, pitch, and roll angles adjustor. The developed probe scanner is applied for scanning magnetic near field on an LTE (Log Term Evolution)-class CMOS RFIC receiver test element group (TEG) chip we separately developed. It is demonstrated that the radiated emission from the TEG chip is suppressed by more than 15 dB by using a 1-μm-thick Co85Zr3Nb12 soft magnetic film integrated on the passivation of the TEG chip.

本文言語English
ホスト出版物のタイトルProceedings of the 2013 International Symposium on Electromagnetic Compatibility, EMC Europe 2013
ページ977-980
ページ数4
出版ステータスPublished - 2013
イベント2013 International Symposium on Electromagnetic Compatibility, EMC Europe 2013 - Brugge, Belgium
継続期間: 2013 9 22013 9 6

出版物シリーズ

名前IEEE International Symposium on Electromagnetic Compatibility
ISSN(印刷版)1077-4076
ISSN(電子版)2158-1118

Other

Other2013 International Symposium on Electromagnetic Compatibility, EMC Europe 2013
国/地域Belgium
CityBrugge
Period13/9/213/9/6

ASJC Scopus subject areas

  • 凝縮系物理学
  • 電子工学および電気工学

フィンガープリント

「A 60×60μm<sup>2</sup> size planar shielded loop probe for low lift-off on-chip magnetic near field measurements」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル