50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process

研究成果: Conference contribution

抄録

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. A 50μm air gap is generated a large between the mirror membrane and the electrode to get a large stroke. A DM with a 4mm×4mm mirror membrane and 8×8 underlying electrode array a is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process.

本文言語English
ホスト出版物のタイトル2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
出版社IEEE Computer Society
ページ171-172
ページ数2
ISBN(電子版)9780992841423
DOI
出版ステータスPublished - 2014 10 14
イベント2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
継続期間: 2014 8 172014 8 21

出版物シリーズ

名前International Conference on Optical MEMS and Nanophotonics
ISSN(印刷版)2160-5033
ISSN(電子版)2160-5041

Other

Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period14/8/1714/8/21

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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