50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process

T. Wu; Takashi Sasaki; Masayuki Akiyama; Kazuhiro Hane

doi:10.1109/OMN.2014.6924577

50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process

T. Wu, Takashi Sasaki, Masayuki Akiyama, Kazuhiro Hane

研究成果: Conference contribution

抄録

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. A 50μm air gap is generated a large between the mirror membrane and the electrode to get a large stroke. A DM with a 4mm×4mm mirror membrane and 8×8 underlying electrode array a is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process.

本文言語	English
ホスト出版物のタイトル	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
出版社	IEEE Computer Society
ページ	171-172
ページ数	2
ISBN（電子版）	9780992841423
DOI	https://doi.org/10.1109/OMN.2014.6924577
出版ステータス	Published - 2014 10 14
イベント	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom 継続期間: 2014 8 17 → 2014 8 21

出版物シリーズ

名前	International Conference on Optical MEMS and Nanophotonics
ISSN（印刷版）	2160-5033
ISSN（電子版）	2160-5041

Other

Other	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Country	United Kingdom
City	Glasgow
Period	14/8/17 → 14/8/21

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

文献へのアクセス

10.1109/OMN.2014.6924577

フィンガープリント「50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル

Wu, T., Sasaki, T., Akiyama, M., & Hane, K. (2014). 50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings (pp. 171-172). [6924577] (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2014.6924577

50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process. / Wu, T.; Sasaki, Takashi ; Akiyama, Masayuki ; Hane, Kazuhiro.

2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society, 2014. p. 171-172 6924577 (International Conference on Optical MEMS and Nanophotonics).

研究成果: Conference contribution

Wu, T, Sasaki, T , Akiyama, M & Hane, K 2014, 50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process. in 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings., 6924577, International Conference on Optical MEMS and Nanophotonics, IEEE Computer Society, pp. 171-172, 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014, Glasgow, United Kingdom, 14/8/17. https://doi.org/10.1109/OMN.2014.6924577

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abstract = "We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. A 50μm air gap is generated a large between the mirror membrane and the electrode to get a large stroke. A DM with a 4mm×4mm mirror membrane and 8×8 underlying electrode array a is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process.",

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