3D imaging of elemental distributions using multi-angle RBS 2D-data

Y. Oishi, K. Hotta, K. Ishii, Y. Komori, S. Matsuyama, H. Yamazaki, Ts Amartivan, M. Rodriguez, K. Katoh, D. Izukawa, K. Mizuma, T. Satoh, T. Kamiya, T. Sakai, K. Arakawa, M. Saidoh, M. Oikawa

研究成果: Conference article査読

抄録

We developed a novel technique to obtain 3D-imaging of elemental distribution based on multi-angle RBS measurement and micro-beam scanning. Since cross-sections of RBS are too small to obtain 3D-imaging, it is necessary to measure scattered particles with large solid angle detectors. Hence, the RBS profiles from each scattering angle are superposed and a true depth profile cannot be obtained. Recently, a large solid angle X-ray detector array consisting of 45 detector elements was installed at the TIARA facility of Japan Energy Research Institute. Each detector element measures X-rays as well as scattered particles. For this utilization, we introduced a technique to superpose RBS profiles and applied it to the surface analysis of an ant's head.

本文言語English
ページ(範囲)117-122
ページ数6
ジャーナルNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
210
DOI
出版ステータスPublished - 2003 9
イベント8th International Conference on Nuclear Microprobe Technology - Takasaki, Japan
継続期間: 2002 9 82002 9 13

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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