TY - JOUR
T1 - 3D-architected and integrated metal oxide nanostructures and beyond produced by three-dimensional nanotemplate pulsed laser deposition
AU - Hattori, Azusa N.
AU - Fujiwara, Yasushi
AU - Fujiwara, Kohei
AU - Tanaka, Hidekazu
N1 - Publisher Copyright:
© 2015 The Surface Science Society of Japan.
PY - 2015/6/6
Y1 - 2015/6/6
N2 - A novel nanofabrication technique, namely three-dimensional (3D) nanotemplate pulsed laser deposition, that can typically be useful for metal oxides has been developed by combining inclined pulsed laser deposition with a 3D nanotemplate prepared by nanoimprint lithography. This method enables the production of size-adjustable and extremely small functional oxide nanostructures with a high packing density over a large area, with high controllability of their shape, location, and alignment. We report various 3D functional metal oxide nanostructures, such as a luminescent ZnO nanobox structure, a ferromagnetic semiconductor (Fe,Zn)3O4 nanobox structure, an (Fe,Mn)3O4 epitaxial nanowall wire structure, and an in-plane metal-oxide-semiconductor hetero epitaxial nanowire structure. These nanostructures should be good candidates for optoelectronic, spintronic, and electronic nanoscale device applications.
AB - A novel nanofabrication technique, namely three-dimensional (3D) nanotemplate pulsed laser deposition, that can typically be useful for metal oxides has been developed by combining inclined pulsed laser deposition with a 3D nanotemplate prepared by nanoimprint lithography. This method enables the production of size-adjustable and extremely small functional oxide nanostructures with a high packing density over a large area, with high controllability of their shape, location, and alignment. We report various 3D functional metal oxide nanostructures, such as a luminescent ZnO nanobox structure, a ferromagnetic semiconductor (Fe,Zn)3O4 nanobox structure, an (Fe,Mn)3O4 epitaxial nanowall wire structure, and an in-plane metal-oxide-semiconductor hetero epitaxial nanowire structure. These nanostructures should be good candidates for optoelectronic, spintronic, and electronic nanoscale device applications.
KW - Metal oxide
KW - Nanoimprint lithography
KW - Pulsed laser deposition
KW - Three-dimensional nanostructure
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U2 - 10.1380/ejssnt.2015.279
DO - 10.1380/ejssnt.2015.279
M3 - Article
AN - SCOPUS:84939146947
VL - 13
SP - 279
EP - 283
JO - e-Journal of Surface Science and Nanotechnology
JF - e-Journal of Surface Science and Nanotechnology
SN - 1348-0391
ER -