15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm× 1.8mm mirror membrane is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

本文言語English
ホスト出版物のタイトル2013 Transducers and Eurosensors XXVII
ホスト出版物のサブタイトルThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
ページ2501-2504
ページ数4
DOI
出版ステータスPublished - 2013 12 1
イベント2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
継続期間: 2013 6 162013 6 20

出版物シリーズ

名前2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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