λ/8 Precision parabolic resonant varifocal mirror

Kenta Nakazawa, Takashi Sasaki, Kazuhiro Hane

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.

本文言語English
ホスト出版物のタイトル2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
出版社IEEE Computer Society
ページ101-102
ページ数2
ISBN(電子版)9780992841423
DOI
出版ステータスPublished - 2014 10 14
イベント2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
継続期間: 2014 8 172014 8 21

出版物シリーズ

名前International Conference on Optical MEMS and Nanophotonics
ISSN(印刷版)2160-5033
ISSN(電子版)2160-5041

Other

Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period14/8/1714/8/21

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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