ZnO as fast EUV scintillator for the next generation lithography

Momoko Tanaka, Masaharu Nishikino, Keisuke Nagashima, Toyoaki Kimura, Yusuke Furukawa, Hidetoshi Murakami, Nobuhiko Sarukura, Hiroshi Yamatani, Akira Yoshikawa, Tsuguo Fukuda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

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Chemical Compounds