ZnO as fast EUV scintillator for the next generation lithography

Momoko Tanaka, Masaharu Nishikino, Keisuke Nagashima, Toyoaki Kimura, Yusuke Furukawa, Hidetoshi Murakami, Nobuhiko Sarukura, Hiroshi Yamatani, Akira Yoshikawa, Tsuguo Fukuda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Using Ni-like Ag extreme ultraviolet (EUV) laser operated at 13.9-nm, ZnO is shown to be the excellent scintillator in this wavelength region with sufficiently short response time of less than 3 nsec and prominent peak fluorescence originated form exciton at 380 nm.

Original languageEnglish
Title of host publication2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, Korea, Republic of
Duration: 2007 Aug 262007 Aug 31

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
CountryKorea, Republic of
CitySeoul
Period07/8/2607/8/31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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