Si and Zn are essentially mutually insoluble. We were able to detect Zn drops at a Si surface by using the refracted x-ray fluorescence method when the Si wafer was implanted with Zn ions at 50 keV up to doses of 1 × 10 16 cm-2. The presence of the Zn drops at the Si surface was confirmed both by measuring surface roughness and Rutherford-backscattering spectroscopy spectra.
ASJC Scopus subject areas
- Physics and Astronomy(all)