Abstract
In this paper, we report on the design and fabrication of zinc oxide (ZnO) photoconductive antenna for a terahertz (THz) pulse emitter and detector for the integration with scanning near-field optical microscopy probe. The fabricated ZnO photoconductive antennas are evaluated in a THz time-domain spectroscopy measurement system. The resistivity of rf sputter deposited ZnO was 9.6x10 4 Ω·cm. The bandwidth of ZnO photoconductive antenna was up to 1 THz.
| Original language | English |
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| Publication status | Published - 2007 |
| Event | Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 - Paris, France Duration: 2007 Mar 27 → 2007 Mar 28 |
Conference
| Conference | Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 |
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| Country/Territory | France |
| City | Paris |
| Period | 07/3/27 → 07/3/28 |
ASJC Scopus subject areas
- Artificial Intelligence
- Computer Networks and Communications
- Computer Science Applications