Zero-order-free, multilayer-coated laminar grating in the 31 nm region

Mitsunori Toyoda; Noboru Miyata; Mihiro Yanagihara; Makoto Watanabe

doi:10.1143/jjap.37.2066

Zero-order-free, multilayer-coated laminar grating in the 31 nm region

Mitsunori Toyoda, Noboru Miyata, Mihiro Yanagihara, Makoto Watanabe

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A laminar holographic grating was coated with a Mo/Si multilayer and the grating efficiency was measured between 27 and 35 nm for an incidence angle of 10°. The zero order was almost suppressed by the negative interference due to the groove profile. The maximum efficiency of first order was 4.8% at 31 nm. It was also found that the spectral wavelength provided by the grating at 10° incidence ranges from 28 nm to 32 nm.

Original language	English
Pages (from-to)	2066-2067
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	37
Issue number	4 PART A
DOIs	https://doi.org/10.1143/jjap.37.2066
Publication status	Published - 1998
Externally published	Yes

Keywords

Grating
Grating efficiency
Laminar grating
Multilayer
Normal incidence
Soft X-ray

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.37.2066

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title = "Zero-order-free, multilayer-coated laminar grating in the 31 nm region",

abstract = "A laminar holographic grating was coated with a Mo/Si multilayer and the grating efficiency was measured between 27 and 35 nm for an incidence angle of 10°. The zero order was almost suppressed by the negative interference due to the groove profile. The maximum efficiency of first order was 4.8% at 31 nm. It was also found that the spectral wavelength provided by the grating at 10° incidence ranges from 28 nm to 32 nm.",

keywords = "Grating, Grating efficiency, Laminar grating, Multilayer, Normal incidence, Soft X-ray",

author = "Mitsunori Toyoda and Noboru Miyata and Mihiro Yanagihara and Makoto Watanabe",

year = "1998",

doi = "10.1143/jjap.37.2066",

language = "English",

volume = "37",

pages = "2066--2067",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

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T1 - Zero-order-free, multilayer-coated laminar grating in the 31 nm region

AU - Toyoda, Mitsunori

AU - Miyata, Noboru

AU - Yanagihara, Mihiro

AU - Watanabe, Makoto

PY - 1998

Y1 - 1998

N2 - A laminar holographic grating was coated with a Mo/Si multilayer and the grating efficiency was measured between 27 and 35 nm for an incidence angle of 10°. The zero order was almost suppressed by the negative interference due to the groove profile. The maximum efficiency of first order was 4.8% at 31 nm. It was also found that the spectral wavelength provided by the grating at 10° incidence ranges from 28 nm to 32 nm.

AB - A laminar holographic grating was coated with a Mo/Si multilayer and the grating efficiency was measured between 27 and 35 nm for an incidence angle of 10°. The zero order was almost suppressed by the negative interference due to the groove profile. The maximum efficiency of first order was 4.8% at 31 nm. It was also found that the spectral wavelength provided by the grating at 10° incidence ranges from 28 nm to 32 nm.

KW - Grating

KW - Grating efficiency

KW - Laminar grating

KW - Multilayer

KW - Normal incidence

KW - Soft X-ray

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EP - 2067

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 4 PART A

ER -

Zero-order-free, multilayer-coated laminar grating in the 31 nm region

Abstract

Keywords

ASJC Scopus subject areas

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