Zero-order-free, multilayer-coated laminar grating in the 31 nm region

Mitsunori Toyoda, Noboru Miyata, Mihiro Yanagihara, Makoto Watanabe

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

A laminar holographic grating was coated with a Mo/Si multilayer and the grating efficiency was measured between 27 and 35 nm for an incidence angle of 10°. The zero order was almost suppressed by the negative interference due to the groove profile. The maximum efficiency of first order was 4.8% at 31 nm. It was also found that the spectral wavelength provided by the grating at 10° incidence ranges from 28 nm to 32 nm.

Original languageEnglish
Pages (from-to)2066-2067
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number4 PART A
Publication statusPublished - 1998 Dec 1

Keywords

  • Grating
  • Grating efficiency
  • Laminar grating
  • Multilayer
  • Normal incidence
  • Soft X-ray

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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