Zernike-type X-ray imaging microscopy at 25 keV with Fresnel zone plate optics

M. Awaji, Y. Suzuki, A. Takeuchi, H. Takano, N. Kamijo, S. Tamura, M. Yasumoto

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

A Zernike-type imaging microscope using a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed and tested at an X-ray energy of 25 keV. The SS-FZP was used as an objective. A copper (Cu) phase plate was placed at the back focal plane of the SS-FZP in order to produce phase contrast. The performance of the Zerniketype imaging microscope was tested with a gold (Au) mesh and a resolution test pattern at undulator beamline 47 of SPring-& The Au mesh and the resolution test pattern could be imaged in transmission with a magnification of × 10.2. Owing to the Cu phase plate, different image contrast was observed compared with the bright-field image contrast. Tantalum microstructures down to 0.5 μm line-and-space have been observed on spatial resolution test patterns.

Original languageEnglish
Pages (from-to)125-127
Number of pages3
JournalJournal of Synchrotron Radiation
Volume9
Issue number3
DOIs
Publication statusPublished - 2002 May 1
Externally publishedYes

Keywords

  • Diffusers
  • Partial coherent illumination
  • Phase plates
  • Sputtered-sliced Fresnel zone plates
  • Zernike-type imaging microscopy

ASJC Scopus subject areas

  • Radiation
  • Nuclear and High Energy Physics
  • Instrumentation

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