A Zernike-type imaging microscope using a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed and tested at an X-ray energy of 25 keV. The SS-FZP was used as an objective. A copper (Cu) phase plate was placed at the back focal plane of the SS-FZP in order to produce phase contrast. The performance of the Zerniketype imaging microscope was tested with a gold (Au) mesh and a resolution test pattern at undulator beamline 47 of SPring-& The Au mesh and the resolution test pattern could be imaged in transmission with a magnification of × 10.2. Owing to the Cu phase plate, different image contrast was observed compared with the bright-field image contrast. Tantalum microstructures down to 0.5 μm line-and-space have been observed on spatial resolution test patterns.
- Partial coherent illumination
- Phase plates
- Sputtered-sliced Fresnel zone plates
- Zernike-type imaging microscopy
ASJC Scopus subject areas
- Nuclear and High Energy Physics