Zernike-type X-ray imaging microscopy at 25 keV with Fresnel zone plate optics

M. Awaji; Y. Suzuki; A. Takeuchi; H. Takano; N. Kamijo; S. Tamura; M. Yasumoto

doi:10.1107/S0909049502004223

Zernike-type X-ray imaging microscopy at 25 keV with Fresnel zone plate optics

M. Awaji, Y. Suzuki, A. Takeuchi, H. Takano, N. Kamijo, S. Tamura, M. Yasumoto

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

A Zernike-type imaging microscope using a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed and tested at an X-ray energy of 25 keV. The SS-FZP was used as an objective. A copper (Cu) phase plate was placed at the back focal plane of the SS-FZP in order to produce phase contrast. The performance of the Zerniketype imaging microscope was tested with a gold (Au) mesh and a resolution test pattern at undulator beamline 47 of SPring-& The Au mesh and the resolution test pattern could be imaged in transmission with a magnification of × 10.2. Owing to the Cu phase plate, different image contrast was observed compared with the bright-field image contrast. Tantalum microstructures down to 0.5 μm line-and-space have been observed on spatial resolution test patterns.

Original language	English
Pages (from-to)	125-127
Number of pages	3
Journal	Journal of Synchrotron Radiation
Volume	9
Issue number	3
DOIs	https://doi.org/10.1107/S0909049502004223
Publication status	Published - 2002 May 1
Externally published	Yes

Keywords

Diffusers
Partial coherent illumination
Phase plates
Sputtered-sliced Fresnel zone plates
Zernike-type imaging microscopy

ASJC Scopus subject areas

Radiation
Nuclear and High Energy Physics
Instrumentation

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10.1107/S0909049502004223

Cite this

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title = "Zernike-type X-ray imaging microscopy at 25 keV with Fresnel zone plate optics",

abstract = "A Zernike-type imaging microscope using a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed and tested at an X-ray energy of 25 keV. The SS-FZP was used as an objective. A copper (Cu) phase plate was placed at the back focal plane of the SS-FZP in order to produce phase contrast. The performance of the Zerniketype imaging microscope was tested with a gold (Au) mesh and a resolution test pattern at undulator beamline 47 of SPring-& The Au mesh and the resolution test pattern could be imaged in transmission with a magnification of × 10.2. Owing to the Cu phase plate, different image contrast was observed compared with the bright-field image contrast. Tantalum microstructures down to 0.5 μm line-and-space have been observed on spatial resolution test patterns.",

keywords = "Diffusers, Partial coherent illumination, Phase plates, Sputtered-sliced Fresnel zone plates, Zernike-type imaging microscopy",

author = "M. Awaji and Y. Suzuki and A. Takeuchi and H. Takano and N. Kamijo and S. Tamura and M. Yasumoto",

year = "2002",

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doi = "10.1107/S0909049502004223",

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AU - Awaji, M.

AU - Suzuki, Y.

AU - Takeuchi, A.

AU - Takano, H.

AU - Kamijo, N.

AU - Tamura, S.

AU - Yasumoto, M.

PY - 2002/5/1

Y1 - 2002/5/1

N2 - A Zernike-type imaging microscope using a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed and tested at an X-ray energy of 25 keV. The SS-FZP was used as an objective. A copper (Cu) phase plate was placed at the back focal plane of the SS-FZP in order to produce phase contrast. The performance of the Zerniketype imaging microscope was tested with a gold (Au) mesh and a resolution test pattern at undulator beamline 47 of SPring-& The Au mesh and the resolution test pattern could be imaged in transmission with a magnification of × 10.2. Owing to the Cu phase plate, different image contrast was observed compared with the bright-field image contrast. Tantalum microstructures down to 0.5 μm line-and-space have been observed on spatial resolution test patterns.

AB - A Zernike-type imaging microscope using a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed and tested at an X-ray energy of 25 keV. The SS-FZP was used as an objective. A copper (Cu) phase plate was placed at the back focal plane of the SS-FZP in order to produce phase contrast. The performance of the Zerniketype imaging microscope was tested with a gold (Au) mesh and a resolution test pattern at undulator beamline 47 of SPring-& The Au mesh and the resolution test pattern could be imaged in transmission with a magnification of × 10.2. Owing to the Cu phase plate, different image contrast was observed compared with the bright-field image contrast. Tantalum microstructures down to 0.5 μm line-and-space have been observed on spatial resolution test patterns.

KW - Diffusers

KW - Partial coherent illumination

KW - Phase plates

KW - Sputtered-sliced Fresnel zone plates

KW - Zernike-type imaging microscopy

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IS - 3

ER -

Zernike-type X-ray imaging microscopy at 25 keV with Fresnel zone plate optics

Abstract

Keywords

ASJC Scopus subject areas

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