XY-stage for scanning media for optical data storage

Minoru Sasaki, Fuminori Bono, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

XY-stage driven by the electrostatic comb-drive actuator is fabricated realizing long displacement. The actuator is fabricated in one layer of silicon-on-insulator (SOI) wafer, and the media plate is in the other layer. The raster scanning of the plate is realized maintaining orthogonal xy-directions. The fast scanning is y-axis. Two 820×950μm2-size media plates are driven at the opposite y directions canceling the inertia force. The static maximum displacements are 110μm (geometrical limit) along x-axis and 90μm along y-axis. At the resonance, 115μm (geometrical limit) is obtained along y-axis.

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
PublisherIEEE Computer Society
Pages36-37
Number of pages2
ISBN (Print)078039562X, 9780780395626
DOIs
Publication statusPublished - 2006 Jan 1
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: 2006 Aug 212006 Aug 24

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period06/8/2106/8/24

Keywords

  • Electrostatic actuator
  • Long displacement
  • Media plate
  • XY-stage

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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