X-ray topography using the forward transmitted beam under multiple-beam diffraction conditions

Y. Tsusaka, S. Takeda, H. Takano, K. Yokoyama, Y. Kagoshima, J. Matsui

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

X-ray topographs are taken for a sapphire wafer with the [0001] surface normal, as an example, by forward transmitted synchrotron x-ray beams combined with two-dimensional electronic arrays in the x-ray detector having a spatial resolution of 1 μm. They exhibit no shape deformation and no position shift of the dislocation lines on the topographs. Since the topography is performed under multiple-beam diffraction conditions, the topographic images of a single diffraction (two-wave approximation condition) or plural diffractions (six-wave approximation condition) can be recorded without large specimen position changes. As usual Lang topographs, it is possible to determine the Burgers vector of each dislocation line. Because of high parallelism of the incoming x-rays and linear sensitivity of the electronic arrays to the incident x-rays, the present technique can be used to visualize individual dislocations in single crystals of the dislocation density as high as 1 × 105 cm-2.

Original languageEnglish
Article number023701
JournalReview of Scientific Instruments
Volume87
Issue number2
DOIs
Publication statusPublished - 2016 Feb 1
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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