X-ray photoelectron spectroscopy of micrometer-size surface area using synchrotron radiation

Ken Ninomiya; Yasuharu Hirai; Atsushi Momose; Sadao Aoki; Keizo Suzuki

doi:10.1143/JJAP.29.L1026

X-ray photoelectron spectroscopy of micrometer-size surface area using synchrotron radiation

Ken Ninomiya, Yasuharu Hirai, Atsushi Momose, Sadao Aoki, Keizo Suzuki

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

An axisymmetric Wolter type I mirror was used at a synchrotron radiation beamline in order to produce a focused X-ray beam with a photon energy of 150 eV. An FWHM (full width at half maximum) of 4 µm was achieved in the beam intensity profile. A Si(2p) XPS spectrum was then observed for a Si sample with this focused beam. This is the first microscopic XPS measurement in the micrometer range that has been achieved using a Wolter type mirror.

Original language	English
Pages (from-to)	L1026-L1028
Journal	Japanese journal of applied physics
Volume	29
Issue number	6
DOIs	https://doi.org/10.1143/JJAP.29.L1026
Publication status	Published - 1990 Jun
Externally published	Yes

Keywords

Focused X-ray beam
Wolter type mirror
Xps

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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abstract = "An axisymmetric Wolter type I mirror was used at a synchrotron radiation beamline in order to produce a focused X-ray beam with a photon energy of 150 eV. An FWHM (full width at half maximum) of 4 µm was achieved in the beam intensity profile. A Si(2p) XPS spectrum was then observed for a Si sample with this focused beam. This is the first microscopic XPS measurement in the micrometer range that has been achieved using a Wolter type mirror.",

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author = "Ken Ninomiya and Yasuharu Hirai and Atsushi Momose and Sadao Aoki and Keizo Suzuki",

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AU - Ninomiya, Ken

AU - Hirai, Yasuharu

AU - Momose, Atsushi

AU - Aoki, Sadao

AU - Suzuki, Keizo

PY - 1990/6

Y1 - 1990/6

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AB - An axisymmetric Wolter type I mirror was used at a synchrotron radiation beamline in order to produce a focused X-ray beam with a photon energy of 150 eV. An FWHM (full width at half maximum) of 4 µm was achieved in the beam intensity profile. A Si(2p) XPS spectrum was then observed for a Si sample with this focused beam. This is the first microscopic XPS measurement in the micrometer range that has been achieved using a Wolter type mirror.

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JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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