Abstract
An axisymmetric Wolter type I mirror was used at a synchrotron radiation beamline in order to produce a focused X-ray beam with a photon energy of 150 eV. An FWHM (full width at half maximum) of 4 µm was achieved in the beam intensity profile. A Si(2p) XPS spectrum was then observed for a Si sample with this focused beam. This is the first microscopic XPS measurement in the micrometer range that has been achieved using a Wolter type mirror.
Original language | English |
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Pages (from-to) | L1026-L1028 |
Journal | Japanese journal of applied physics |
Volume | 29 |
Issue number | 6 |
DOIs | |
Publication status | Published - 1990 Jun |
Externally published | Yes |
Keywords
- Focused X-ray beam
- Wolter type mirror
- Xps
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)