X-ray photoelectron spectroscopy of micrometer-size surface area using synchrotron radiation

Ken Ninomiya, Yasuharu Hirai, Atsushi Momose, Sadao Aoki, Keizo Suzuki

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

An axisymmetric Wolter type I mirror was used at a synchrotron radiation beamline in order to produce a focused X-ray beam with a photon energy of 150 eV. An FWHM (full width at half maximum) of 4 µm was achieved in the beam intensity profile. A Si(2p) XPS spectrum was then observed for a Si sample with this focused beam. This is the first microscopic XPS measurement in the micrometer range that has been achieved using a Wolter type mirror.

Original languageEnglish
Pages (from-to)L1026-L1028
JournalJapanese journal of applied physics
Volume29
Issue number6
DOIs
Publication statusPublished - 1990 Jun
Externally publishedYes

Keywords

  • Focused X-ray beam
  • Wolter type mirror
  • Xps

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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