X-Ray fluorescence analysis by multiple-glancing x-ray beam excitation

Kouichi Tsuji, Tasaku Sato, Kazuaki Wagatsuma

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Total-reflection X-ray fluorescence analysis is usually carried out using a single X-ray beam to irradiate a sample surface at a glancing angle from one direction. We have attempted to conduct X-ray fluorescence analysis using multiple glancing X-ray beams emitted from a glow discharge X-ray tube. Fe characteristic X-rays were used as the primary X-rays to irradiate a thin Cr film (sample) on a flat acrylic carrier at multiple glancing angles. We have concluded that multiple X-ray beam excitation is an effective method for enhancement of X-ray fluorescence intensity.

Original languageEnglish
Pages (from-to)5821-5822
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number10
Publication statusPublished - 1998 Oct
Externally publishedYes


  • Glancing incidence
  • Glow discharge X-ray tube
  • Multiple-X-ray beams
  • Surface analysis
  • Thin film
  • Total-reflection X-ray fluorescence

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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