TY - GEN
T1 - X-band filters utilizing AlN thin film bulk acoustic resonators
AU - Hara, Motoaki
AU - Yokoyama, Tsuyoshi
AU - Ueda, Masanori
AU - Satoh, Yoshio
PY - 2007/12/1
Y1 - 2007/12/1
N2 - A filter with aluminum nitride thin-film bulk acoustic resonators (FBAR) for the X-band was developed. The FBAR has an air gap beneath the resonator to isolate acoustically from a substrate, and is extremely thin to operate in the X-band. The FBAR has two structural features - a sacrificial layer to make the air gap was very thin in order to prevent the resonator from cracking on the edge of the air gap, and a resonator was deformed to dome shape by stresses of the films to keep the air gap. The fabricated FBAR operated successfully with a keff of 6.40%, a resonance Q of 246, and anti-resonance Q of 462. The fabricated filter had a center frequency of 9.07 GHz, a fractional bandwidth of 3.1%, a minimum insertion loss of-1.7 dB, and an out-of-band rejection of -21 dB.
AB - A filter with aluminum nitride thin-film bulk acoustic resonators (FBAR) for the X-band was developed. The FBAR has an air gap beneath the resonator to isolate acoustically from a substrate, and is extremely thin to operate in the X-band. The FBAR has two structural features - a sacrificial layer to make the air gap was very thin in order to prevent the resonator from cracking on the edge of the air gap, and a resonator was deformed to dome shape by stresses of the films to keep the air gap. The fabricated FBAR operated successfully with a keff of 6.40%, a resonance Q of 246, and anti-resonance Q of 462. The fabricated filter had a center frequency of 9.07 GHz, a fractional bandwidth of 3.1%, a minimum insertion loss of-1.7 dB, and an out-of-band rejection of -21 dB.
KW - Air gap
KW - Aln
KW - FBAR
KW - Filter
KW - X-band
UR - http://www.scopus.com/inward/record.url?scp=48149115346&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48149115346&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2007.291
DO - 10.1109/ULTSYM.2007.291
M3 - Conference contribution
AN - SCOPUS:48149115346
SN - 1424413834
SN - 9781424413836
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 1152
EP - 1155
BT - 2007 IEEE Ultrasonics Symposium Proceedings, IUS
T2 - 2007 IEEE Ultrasonics Symposium, IUS
Y2 - 28 October 2007 through 31 October 2007
ER -