Work function controllability of metal gates made by interdiffusing metal stacks with low and high work functions

T. Matsukawa, Y. X. Liu, M. Masahara, K. Ishii, K. Endo, H. Yamauchi, E. Sugimata, H. Takashima, T. Higashino, E. Suzuki, S. Kanemaru

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11 Citations (Scopus)

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Chemical Compounds