Work function control of metal gates by interdiffused Ni-Ta with high thermal stability

T. Matsukawa, Y. X. Liu, M. Masahara, K. Endo, K. Ishii, H. Yamauchi, E. Sugimata, H. Takashima, S. Kanemaru, E. Suzuki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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Engineering & Materials Science