Wireless micro-machine with magnetic thin film

Aya Yamazaki, Masahiko Sendoh, Kazushi Ishiyama, Ken Ichi Arai, Ryutaro Kato, Masaki Nakano, Hirotoshi Fukunaga

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

As the magnetic micro-machines are driven by a magnetic field, they require no power supply cables, no batteries, and no controlling systems on the machine body. We fabricated the spiral-type micro-machine (outer diameter; 0.14 mm, length; 1.0 mm) by a tungsten wire (φ 20 pm). NdFeB film magnet was deposited on the spiral-machine by the PLD method. In the experiment, the wireless micro-machine swam at the speed of 0.2 ∼ 1.6 mm/s. This result indicated that the spiral shape was suitable for miniature swimming machine.

Original languageEnglish
Title of host publicationMHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages39-44
Number of pages6
ISBN (Electronic)0780381653, 9780780381650
DOIs
Publication statusPublished - 2003 Jan 1
EventInternational Symposium on Micromechatronics and Human Science, MHS 2003 - Nagoya, Japan
Duration: 2003 Oct 192003 Oct 22

Publication series

NameMHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science

Other

OtherInternational Symposium on Micromechatronics and Human Science, MHS 2003
CountryJapan
CityNagoya
Period03/10/1903/10/22

ASJC Scopus subject areas

  • Biotechnology
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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