Wireless driving of micromirror using electromagnetic induction

Minoru Sasaki; Narimune Ohnishi; Shinya Kumagai; Kazuhiro Hane

doi:10.1109/OMEMS.2009.5338629

Wireless driving of micromirror using electromagnetic induction

Minoru Sasaki, Narimune Ohnishi, Shinya Kumagai, Kazuhiro Hane

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6^○ at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.

Original language	English
Title of host publication	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages	11-12
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2009.5338629
Publication status	Published - 2009 Dec 16
Event	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: 2009 Aug 17 → 2009 Aug 20

Publication series

Name	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Country/Territory	United States
City	Clearwater, FL
Period	09/8/17 → 09/8/20

Keywords

Electromagnetic induction
Electrostatic driving
Micromirror
Wireless driving

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2009.5338629

Cite this

Wireless driving of micromirror using electromagnetic induction. / Sasaki, Minoru; Ohnishi, Narimune; Kumagai, Shinya et al.

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 11-12 5338629 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sasaki, M, Ohnishi, N, Kumagai, S & Hane, K 2009, Wireless driving of micromirror using electromagnetic induction. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338629, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, pp. 11-12, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 09/8/17. https://doi.org/10.1109/OMEMS.2009.5338629

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title = "Wireless driving of micromirror using electromagnetic induction",

abstract = "The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6○ at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.",

keywords = "Electromagnetic induction, Electrostatic driving, Micromirror, Wireless driving",

author = "Minoru Sasaki and Narimune Ohnishi and Shinya Kumagai and Kazuhiro Hane",

year = "2009",

month = dec,

day = "16",

doi = "10.1109/OMEMS.2009.5338629",

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series = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

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booktitle = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

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AU - Sasaki, Minoru

AU - Ohnishi, Narimune

AU - Kumagai, Shinya

AU - Hane, Kazuhiro

PY - 2009/12/16

Y1 - 2009/12/16

N2 - The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6○ at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.

AB - The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6○ at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.

KW - Electromagnetic induction

KW - Electrostatic driving

KW - Micromirror

KW - Wireless driving

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BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

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ER -

Wireless driving of micromirror using electromagnetic induction

Abstract

Publication series

Other

Keywords

ASJC Scopus subject areas

Access to Document

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