Wireless driving of micromirror using electromagnetic induction

Minoru Sasaki, Narimune Ohnishi, Shinya Kumagai, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6 at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.

Original languageEnglish
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages11-12
Number of pages2
DOIs
Publication statusPublished - 2009 Dec 16
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: 2009 Aug 172009 Aug 20

Publication series

Name2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
CountryUnited States
CityClearwater, FL
Period09/8/1709/8/20

Keywords

  • Electromagnetic induction
  • Electrostatic driving
  • Micromirror
  • Wireless driving

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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