Wine-glass mode micro-mechanical resonator

Kazumasa Ikoma, Masanobu Okazaki, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

This paper reports on the fabrication and measurement of a wine-glass mode micromechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10μm and 20μm, respectively. Our resonator shows a resonant frequency of f0=88.5MHz, a motional resistance of RX=8.3M Ω and a quality factor of 5000 in air.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Pages1289-1292
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 2006 Oct 222006 Oct 25

Publication series

NameProceedings of IEEE Sensors

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period06/10/2206/10/25

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Wine-glass mode micro-mechanical resonator'. Together they form a unique fingerprint.

  • Cite this

    Ikoma, K., Okazaki, M., & Esashi, M. (2006). Wine-glass mode micro-mechanical resonator. In 2006 5th IEEE Conference on Sensors (pp. 1289-1292). [4178860] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.355865