Wine-glass mode micro-mechanical resonator

Kazumasa Ikoma, Masanobu Okazaki, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)


This paper reports on the fabrication and measurement of a wine-glass mode micromechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10μm and 20μm, respectively. Our resonator shows a resonant frequency of f0=88.5MHz, a motional resistance of RX=8.3M Ω and a quality factor of 5000 in air.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Number of pages4
Publication statusPublished - 2006 Dec 1
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 2006 Oct 222006 Oct 25

Publication series

NameProceedings of IEEE Sensors


Other2006 5th IEEE Conference on Sensors
Country/TerritoryKorea, Republic of

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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