Wine-glass mode micro-mechanical resonator

Kazumasa Ikoma; Masanobu Okazaki; Masayoshi Esashi

doi:10.1109/ICSENS.2007.355865

Wine-glass mode micro-mechanical resonator

Kazumasa Ikoma, Masanobu Okazaki, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

14 Citations (Scopus)

Abstract

This paper reports on the fabrication and measurement of a wine-glass mode micromechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10μm and 20μm, respectively. Our resonator shows a resonant frequency of f₀=88.5MHz, a motional resistance of R_X=8.3M Ω and a quality factor of 5000 in air.

Original language	English
Title of host publication	2006 5th IEEE Conference on Sensors
Pages	1289-1292
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2007.355865
Publication status	Published - 2006 Dec 1
Event	2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: 2006 Oct 22 → 2006 Oct 25

Publication series

Name	Proceedings of IEEE Sensors

Other

Other	2006 5th IEEE Conference on Sensors
Country/Territory	Korea, Republic of
City	Daegu
Period	06/10/22 → 06/10/25

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/ICSENS.2007.355865

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@inproceedings{ff8879dc686643448f9a15b87ccf85e2,

title = "Wine-glass mode micro-mechanical resonator",

abstract = "This paper reports on the fabrication and measurement of a wine-glass mode micromechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10μm and 20μm, respectively. Our resonator shows a resonant frequency of f0=88.5MHz, a motional resistance of RX=8.3M Ω and a quality factor of 5000 in air.",

author = "Kazumasa Ikoma and Masanobu Okazaki and Masayoshi Esashi",

year = "2006",

month = dec,

day = "1",

doi = "10.1109/ICSENS.2007.355865",

language = "English",

isbn = "1424403766",

series = "Proceedings of IEEE Sensors",

pages = "1289--1292",

booktitle = "2006 5th IEEE Conference on Sensors",

note = "2006 5th IEEE Conference on Sensors ; Conference date: 22-10-2006 Through 25-10-2006",

}

TY - GEN

T1 - Wine-glass mode micro-mechanical resonator

AU - Ikoma, Kazumasa

AU - Okazaki, Masanobu

AU - Esashi, Masayoshi

PY - 2006/12/1

Y1 - 2006/12/1

N2 - This paper reports on the fabrication and measurement of a wine-glass mode micromechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10μm and 20μm, respectively. Our resonator shows a resonant frequency of f0=88.5MHz, a motional resistance of RX=8.3M Ω and a quality factor of 5000 in air.

AB - This paper reports on the fabrication and measurement of a wine-glass mode micromechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10μm and 20μm, respectively. Our resonator shows a resonant frequency of f0=88.5MHz, a motional resistance of RX=8.3M Ω and a quality factor of 5000 in air.

UR - http://www.scopus.com/inward/record.url?scp=50149102622&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50149102622&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2007.355865

DO - 10.1109/ICSENS.2007.355865

M3 - Conference contribution

AN - SCOPUS:50149102622

SN - 1424403766

SN - 9781424403769

T3 - Proceedings of IEEE Sensors

SP - 1289

EP - 1292

BT - 2006 5th IEEE Conference on Sensors

T2 - 2006 5th IEEE Conference on Sensors

Y2 - 22 October 2006 through 25 October 2006

ER -

Wine-glass mode micro-mechanical resonator

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