Widely changing probability of surface damage creation induced by a single ion in the MeV ion energy range

Hisato Ogiso; Hiroshi Tokumoto; Shizuka Nakano; Kazushi Yamanaka

Widely changing probability of surface damage creation induced by a single ion in the MeV ion energy range

Hisato Ogiso, Hiroshi Tokumoto, Shizuka Nakano, Kazushi Yamanaka

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

We report widely changing probability of surface damage creation induced by a single ion on highly oriented pyrolytic graphite specimens, each implanted with 3.1 MeV Si, Cu, As, Sr, Ag, or Au ions at a dose of 1.9 × 10¹¹ cm^-2. By using a friction force microscope, we observed lattice disordered surface damage, and found the probability of surface damage creation varying from 0.02 to 0.54 depending on the variation in the ion species. To determine the reason for the larger dependence on ion species, we calculated the probabilities of knock-on atom generation by nuclear collision. The calculated probability of knock-on atom generation agreed well with the observed probability of surface damage creation.

Original language	English
Pages (from-to)	1914-1918
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	16
Issue number	4
Publication status	Published - 1998 Jul 1

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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Widely changing probability of surface damage creation induced by a single ion in the MeV ion energy range. / Ogiso, Hisato; Tokumoto, Hiroshi; Nakano, Shizuka; Yamanaka, Kazushi.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 16, No. 4, 01.07.1998, p. 1914-1918.

Research output: Contribution to journal › Article › peer-review

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