We report widely changing probability of surface damage creation induced by a single ion on highly oriented pyrolytic graphite specimens, each implanted with 3.1 MeV Si, Cu, As, Sr, Ag, or Au ions at a dose of 1.9 × 1011 cm-2. By using a friction force microscope, we observed lattice disordered surface damage, and found the probability of surface damage creation varying from 0.02 to 0.54 depending on the variation in the ion species. To determine the reason for the larger dependence on ion species, we calculated the probabilities of knock-on atom generation by nuclear collision. The calculated probability of knock-on atom generation agreed well with the observed probability of surface damage creation.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 1998 Jul 1|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering