Wideband tunable love wave filter using electrostatically-actuated MEMS variable capacitors integrated on lithium niobate

T. Yasue, T. Komatsu, N. Nakamura, K. Hashimoto, H. Hirano, M. Esashi, S. Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. We have demonstrated a wideband tunable filter with the center frequency of 1.08 GHz by directly integrating Love wave resonators and electrostatically-actuated MEMS variable capacitors on a 15°Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2 ∼ 30 %), providing wide bandwidth and wide tuning range. We confirmed that the 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1488-1491
Number of pages4
DOIs
Publication statusPublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • Love wave
  • SAW filter
  • Tunable filter
  • Variable capacitor

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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