Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Toshiki Yasue; Tomoya Komatsu; Nobuyuki Nakamura; Ken Ya Hashimoto; Hideki Hirano; Masayoshi Esashi; Shuji Tanaka

doi:10.1016/j.sna.2012.01.017

Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Toshiki Yasue, Tomoya Komatsu, Nobuyuki Nakamura, Ken Ya Hashimoto, Hideki Hirano, Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08 GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15°Y LiNbO₃ wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k² ∼ 30%), providing wide bandwidth and wide tuning range. The 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.

Original language	English
Pages (from-to)	456-462
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	188
DOIs	https://doi.org/10.1016/j.sna.2012.01.017
Publication status	Published - 2012 Dec

Keywords

Love wave
SAW filter
Tunable filter
Variable capacitor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/j.sna.2012.01.017

Cite this

@article{87e01744557d497fa43053bc843f7be4,

title = "Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate",

abstract = "A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08 GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15°Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2 ∼ 30%), providing wide bandwidth and wide tuning range. The 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.",

keywords = "Love wave, SAW filter, Tunable filter, Variable capacitor",

author = "Toshiki Yasue and Tomoya Komatsu and Nobuyuki Nakamura and Hashimoto, {Ken Ya} and Hideki Hirano and Masayoshi Esashi and Shuji Tanaka",

note = "Funding Information: This research was supported by the Japan Society for the Promotion of Science (JSPS) through its “Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program).” Copyright: Copyright 2012 Elsevier B.V., All rights reserved.",

year = "2012",

month = dec,

doi = "10.1016/j.sna.2012.01.017",

language = "English",

volume = "188",

pages = "456--462",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

}

TY - JOUR

T1 - Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

AU - Yasue, Toshiki

AU - Komatsu, Tomoya

AU - Nakamura, Nobuyuki

AU - Hashimoto, Ken Ya

AU - Hirano, Hideki

AU - Esashi, Masayoshi

AU - Tanaka, Shuji

N1 - Funding Information: This research was supported by the Japan Society for the Promotion of Science (JSPS) through its “Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program).” Copyright: Copyright 2012 Elsevier B.V., All rights reserved.

PY - 2012/12

Y1 - 2012/12

N2 - A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08 GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15°Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2 ∼ 30%), providing wide bandwidth and wide tuning range. The 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.

AB - A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08 GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15°Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2 ∼ 30%), providing wide bandwidth and wide tuning range. The 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.

KW - Love wave

KW - SAW filter

KW - Tunable filter

KW - Variable capacitor

UR - http://www.scopus.com/inward/record.url?scp=84870058169&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84870058169&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2012.01.017

DO - 10.1016/j.sna.2012.01.017

M3 - Article

AN - SCOPUS:84870058169

VL - 188

SP - 456

EP - 462

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

ER -

Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this