Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Toshiki Yasue; Tomoya Komatsu; Nobuyuki Nakamura; Ken Ya Hashimoto; Hideki Hirano; Masayoshi Esashi; Shuji Tanaka

doi:10.1016/j.sna.2012.01.017

Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Toshiki Yasue, Tomoya Komatsu, Nobuyuki Nakamura, Ken Ya Hashimoto, Hideki Hirano, Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08 GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15°Y LiNbO₃ wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k² ∼ 30%), providing wide bandwidth and wide tuning range. The 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.

Original language	English
Pages (from-to)	456-462
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	188
DOIs	https://doi.org/10.1016/j.sna.2012.01.017
Publication status	Published - 2012 Dec 1

Keywords

Love wave
SAW filter
Tunable filter
Variable capacitor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate. / Yasue, Toshiki; Komatsu, Tomoya; Nakamura, Nobuyuki; Hashimoto, Ken Ya; Hirano, Hideki; Esashi, Masayoshi; Tanaka, Shuji.

In: Sensors and Actuators, A: Physical, Vol. 188, 01.12.2012, p. 456-462.

Research output: Contribution to journal › Article › peer-review

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AU - Esashi, Masayoshi

AU - Tanaka, Shuji

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