Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

Toshiki Yasue, Tomoya Komatsu, Nobuyuki Nakamura, Ken Ya Hashimoto, Hideki Hirano, Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08 GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15°Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2 ∼ 30%), providing wide bandwidth and wide tuning range. The 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.

Original languageEnglish
Pages (from-to)456-462
Number of pages7
JournalSensors and Actuators, A: Physical
Volume188
DOIs
Publication statusPublished - 2012 Dec

Keywords

  • Love wave
  • SAW filter
  • Tunable filter
  • Variable capacitor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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