Abstract
A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08 GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15°Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2 ∼ 30%), providing wide bandwidth and wide tuning range. The 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.
Original language | English |
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Pages (from-to) | 456-462 |
Number of pages | 7 |
Journal | Sensors and Actuators, A: Physical |
Volume | 188 |
DOIs | |
Publication status | Published - 2012 Dec |
Keywords
- Love wave
- SAW filter
- Tunable filter
- Variable capacitor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering