Preliminary results of a wide range reflection multilayer in a range from 200 nm to 25 nm (6 eV to 50 eV) for normal incidence are reported. The structure of the multilayer is [SiC (6.0 nm)](top single layer)/[Y2O3(5.0 nm)/Mg(12.5 nm)/Y2O3(3.3 nm)/Mg(10.0 nm)](middle-aperiodic layers)/[Y2O3(3.0 nm)/Mg(9.9 nm)]×15 (piled-double-layers). Its normal incidence reflectance was more than 0.25 in 220 - 115 nm region and more than 0.04 in 34 - 24 nm region.
ASJC Scopus subject areas
- Physics and Astronomy(all)