Wide dynamic range silicon diaphragm vacuum sensor by electrostatic servo system

Haruzo Miyashita, Masayoshi Esashi

Research output: Contribution to journalConference article

25 Citations (Scopus)

Abstract

The micromachined wide dynamic range electrostatic servo system with silicon diaphragm vacuum sensor was developed to transduce capacitance into voltage. Servo control was demonstrated by the use of an electrical circuit. Linear characteristics were obtained between the output voltage and pressure for the nonservo mode. The results established the proportionality between pressure and square root of the servo voltage.

Original languageEnglish
Pages (from-to)2692-2697
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number6
DOIs
Publication statusPublished - 2000 Nov 1
Event44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA
Duration: 2000 May 302000 Jun 2

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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