Abstract
The micromachined wide dynamic range electrostatic servo system with silicon diaphragm vacuum sensor was developed to transduce capacitance into voltage. Servo control was demonstrated by the use of an electrical circuit. Linear characteristics were obtained between the output voltage and pressure for the nonservo mode. The results established the proportionality between pressure and square root of the servo voltage.
| Original language | English |
|---|---|
| Pages (from-to) | 2692-2697 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 18 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2000 Nov 1 |
| Event | 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA Duration: 2000 May 30 → 2000 Jun 2 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
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Cite this
Miyashita, H., & Esashi, M. (2000). Wide dynamic range silicon diaphragm vacuum sensor by electrostatic servo system. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 18(6), 2692-2697. https://doi.org/10.1116/1.1320807