What is the most important growth parameter on crystal quality of the silicon layer by LPE method?

Toru Ujihara, Kazuo Obara, Noritaka Usami, Kozo Fujiwara, Gen Sazaki, Toetsu Shishido, Kazuo Nakajima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science