Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates

S. Komiyama, Y. Sutou, K. Oikawa, J. Koike, M. Wang, M. Sakurai

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

The wear properties of δ-(Ti,Mo)N films deposited at low and high nitrogen gas flow rates (fN2) were investigated. The film at fN2=2.0 sccm showed better adhesive wear resistance than that at fN2=0.3 sccm. Such improvement in the film at fN2=2.0 sccm was due to the formation of Mo oxide debris by wear oxidation. It was found that Mo oxidation more easily occurred in the film at fN2=2.0 sccm than in the film at fN2=0.3 sccm. Thermodynamic consideration indicated that since the activity of Ti in δ-(Ti,Mo)N decreases with increasing N content, Mo oxidation is promoted in the film at fN2=2.0 sccm, which leads to better wear properties.

Original languageEnglish
Pages (from-to)32-39
Number of pages8
JournalTribology International
Volume87
DOIs
Publication statusPublished - 2015 Jul

Keywords

  • Coating
  • Debris
  • Self-lubricating

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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