Weak metastability of Al xGa1- x N ( x = 13/24, 15/24, 17/24) shown by analyzing AlGaN grown on AlN with dense macrosteps

Akira Hirano; Yosuke Nagasawa; Masamichi Ippommatsu; Hideki Sako; Ai Hashimoto; Ryuichi Sugie; Yoshio Honda; Hiroshi Amano; Kazunobu Kojima; Shigefusa F. Chichibu

doi:10.35848/1882-0786/ac79a1

Weak metastability of Al _xGa_{1- x}N ( x = 13/24, 15/24, 17/24) shown by analyzing AlGaN grown on AlN with dense macrosteps

Akira Hirano, Yosuke Nagasawa, Masamichi Ippommatsu, Hideki Sako, Ai Hashimoto, Ryuichi Sugie, Yoshio Honda, Hiroshi Amano, Kazunobu Kojima, Shigefusa F. Chichibu

Division of Measurements

Research output: Contribution to journal › Article › peer-review

Abstract

Energy-dispersive X-ray signals calibrated by Rutherford backscattering indicated the generation of Al13/24Ga11/24N in Ga-rich stripes in a nonflat Al0.58Ga0.42N layer. Also, the CL peak wavelengths of ∼259 and 272 nm also showed the generation of Al15/24Ga9/24N and Al13/24Ga11/24N in Al-rich zones and Ga-rich stripes, respectively. The wavelength of a strong CL peak at ∼246 nm, which was observed from the Al0.7Ga0.3N layer in our previous study, is also considered to correspond to the near-band-emission wavelengths of Al17/24Ga7/24N. In particular, the stronger reproducibility of metastable Al15/24Ga9/24N generation was confirmed, in agreement with the computed predictions by other research groups.

Original language	English
Article number	075505
Journal	Applied Physics Express
Volume	15
Issue number	7
DOIs	https://doi.org/10.35848/1882-0786/ac79a1
Publication status	Published - 2022 Jul

Keywords

AlGaN
cathodoluminescence
EDX
metastability
ordering

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.35848/1882-0786/ac79a1

Cite this

@article{3f527f5e1e6f4f629f6609cc4d8dee2e,

title = "Weak metastability of Al xGa1- x N ( x = 13/24, 15/24, 17/24) shown by analyzing AlGaN grown on AlN with dense macrosteps",

abstract = "Energy-dispersive X-ray signals calibrated by Rutherford backscattering indicated the generation of Al13/24Ga11/24N in Ga-rich stripes in a nonflat Al0.58Ga0.42N layer. Also, the CL peak wavelengths of ∼259 and 272 nm also showed the generation of Al15/24Ga9/24N and Al13/24Ga11/24N in Al-rich zones and Ga-rich stripes, respectively. The wavelength of a strong CL peak at ∼246 nm, which was observed from the Al0.7Ga0.3N layer in our previous study, is also considered to correspond to the near-band-emission wavelengths of Al17/24Ga7/24N. In particular, the stronger reproducibility of metastable Al15/24Ga9/24N generation was confirmed, in agreement with the computed predictions by other research groups.",

keywords = "AlGaN, cathodoluminescence, EDX, metastability, ordering",

author = "Akira Hirano and Yosuke Nagasawa and Masamichi Ippommatsu and Hideki Sako and Ai Hashimoto and Ryuichi Sugie and Yoshio Honda and Hiroshi Amano and Kazunobu Kojima and Chichibu, {Shigefusa F.}",

note = "Publisher Copyright: {\textcopyright} 2022 The Japan Society of Applied Physics.",

year = "2022",

month = jul,

doi = "10.35848/1882-0786/ac79a1",

language = "English",

volume = "15",

journal = "Applied Physics Express",

issn = "1882-0778",

publisher = "Japan Society of Applied Physics",

number = "7",

}

TY - JOUR

T1 - Weak metastability of Al xGa1- x N ( x = 13/24, 15/24, 17/24) shown by analyzing AlGaN grown on AlN with dense macrosteps

AU - Hirano, Akira

AU - Nagasawa, Yosuke

AU - Ippommatsu, Masamichi

AU - Sako, Hideki

AU - Hashimoto, Ai

AU - Sugie, Ryuichi

AU - Honda, Yoshio

AU - Amano, Hiroshi

AU - Kojima, Kazunobu

AU - Chichibu, Shigefusa F.

PY - 2022/7

Y1 - 2022/7

N2 - Energy-dispersive X-ray signals calibrated by Rutherford backscattering indicated the generation of Al13/24Ga11/24N in Ga-rich stripes in a nonflat Al0.58Ga0.42N layer. Also, the CL peak wavelengths of ∼259 and 272 nm also showed the generation of Al15/24Ga9/24N and Al13/24Ga11/24N in Al-rich zones and Ga-rich stripes, respectively. The wavelength of a strong CL peak at ∼246 nm, which was observed from the Al0.7Ga0.3N layer in our previous study, is also considered to correspond to the near-band-emission wavelengths of Al17/24Ga7/24N. In particular, the stronger reproducibility of metastable Al15/24Ga9/24N generation was confirmed, in agreement with the computed predictions by other research groups.

AB - Energy-dispersive X-ray signals calibrated by Rutherford backscattering indicated the generation of Al13/24Ga11/24N in Ga-rich stripes in a nonflat Al0.58Ga0.42N layer. Also, the CL peak wavelengths of ∼259 and 272 nm also showed the generation of Al15/24Ga9/24N and Al13/24Ga11/24N in Al-rich zones and Ga-rich stripes, respectively. The wavelength of a strong CL peak at ∼246 nm, which was observed from the Al0.7Ga0.3N layer in our previous study, is also considered to correspond to the near-band-emission wavelengths of Al17/24Ga7/24N. In particular, the stronger reproducibility of metastable Al15/24Ga9/24N generation was confirmed, in agreement with the computed predictions by other research groups.

KW - AlGaN

KW - cathodoluminescence

KW - EDX

KW - metastability

KW - ordering

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JO - Applied Physics Express

JF - Applied Physics Express

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