Wavelet analysis for precision measurement of a micro-part

Toshiki Takeishi, Xu Bin, Yuki Shimizu, Wei Gao

Research output: Contribution to conferencePaper

Abstract

This paper presents precision measurement of a micro-part which has micro-structured surfaces. Micro-parts sometimes have short pitches and large amplitudes. Measurements are conducted by the use of conventional measuring instruments and found that these instruments are difficult to measure their profiles. A novel measuring system is presented which uses a contact-type displacement sensor, probe shaft of which is levitated by air-bearings to reduce the contact force. After developing the new measuring system, measurement and analysis results are shown. Wavelet analysis reveals that there are errors in the measurement results and they are caused by stylus jump.

Original languageEnglish
Publication statusPublished - 2011 Dec 1
Event6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan
Duration: 2011 Nov 82011 Nov 10

Other

Other6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
CountryJapan
CityOmiya Sonic City, Saitama
Period11/11/811/11/10

Keywords

  • Displacement sensor
  • Measurement
  • Surface profiler
  • Wavelet analysis

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Takeishi, T., Bin, X., Shimizu, Y., & Gao, W. (2011). Wavelet analysis for precision measurement of a micro-part. Paper presented at 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan.