Waveguide and guided-wave devices consisting of heterostructured photonic crystals

S. Kawakami, T. Sato, K. Miura, Yasuo Ohtera, T. Kawashima, H. Ohkubo

Research output: Contribution to journalConference articlepeer-review

6 Citations (Scopus)

Abstract

We report a strategy of industrialization of photonic-crystal based optical devices: We first review requirements for passive photonic crystal components. Although they have remarkable properties, they have at the same time severe difficulties such as difficulty of practical coupling to/from optical fibers and a relatively large propagation loss. This paper present an approach of meeting the requirements using heterostructured photonic crystals fabricated by autocloning. A low-loss, simple structured waveguide and sophisticated functional blocks (such as a resonator) can be integrated by a simple process. We first prepare a substrate patterned and corrugated by electron beam lithography and dry etching. Ta2O5/SiO2 mutilayers are repeatedly deposited on the substrate, and no other process is needed to complete the chip. After dicing and polishing, the waveguide can be butt-jointed with an optical fiber and the loss is estimated as 1.3 dB/mm. A resonator with Q = 270 is also demonstrated. Furore outlooks of the technology are also discussed.

Original languageEnglish
Pages (from-to)279-288
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4870
DOIs
Publication statusPublished - 2002 Jan 1
EventActive and Passive Optical Components for WDM Communications II - Boston, MA, United States
Duration: 2002 Jul 292002 Aug 1

Keywords

  • Autocloning
  • Guided-wave device
  • Heterostructure
  • Photonic crystal
  • Resonator
  • Sputter deposition
  • Sputter etching
  • TEC fiber
  • Waveguide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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