TY - JOUR
T1 - Waveguide and guided-wave devices consisting of heterostructured photonic crystals
AU - Ohtera, Yasuo
AU - Ohkubo, Hiroyuki
AU - Miura, Kenta
AU - Sato, Takashi
AU - Kawashima, Takayuki
AU - Kawakami, Shirijo
N1 - Funding Information:
This work was sponsored by the Special Correlation Funds for Promoting Science and Technology from the Ministry of Education, Culture, Sports, Science, and Technology, and supported by the Telecommunications Advancement Organization of Japan (TAO) and the Japan Science and Technology Agency(JST). Part of this work was carried out in the Laboratory for Electronic Intelligent Systems and the Venture Business Laboratory of Tohoku University.
PY - 2004/5
Y1 - 2004/5
N2 - We report a strategy for the industrialization of photonic-crystal-based optical devices, starting with a review of the requirements for passive photonic crystal components. Although they have remarkable properties, such components are difficult to couple to/from optical fibers and have a relatively large propagation loss. We present an approach for meeting the requirements by using heterostructured photonic crystals fabricated by the autocloning technology. A low-loss, simple structured waveguide and sophisticated functional blocks (such as a resonator) can be integrated by a simple process. We first prepare a substrate patterned and corrugated by electron beam lithography and dry etching. Ta2O5/SiO2 multilayers are repeatedly deposited on the substrate, and no other process is needed to complete the chip. After dicing and polishing, the waveguide can be butt-jointed with an optical fiber, and the loss is estimated as 0.1 dB/mm. A resonator with Q = 11,700 is also demonstrated. Recent progress and the future outlooks for the technology are also discussed.
AB - We report a strategy for the industrialization of photonic-crystal-based optical devices, starting with a review of the requirements for passive photonic crystal components. Although they have remarkable properties, such components are difficult to couple to/from optical fibers and have a relatively large propagation loss. We present an approach for meeting the requirements by using heterostructured photonic crystals fabricated by the autocloning technology. A low-loss, simple structured waveguide and sophisticated functional blocks (such as a resonator) can be integrated by a simple process. We first prepare a substrate patterned and corrugated by electron beam lithography and dry etching. Ta2O5/SiO2 multilayers are repeatedly deposited on the substrate, and no other process is needed to complete the chip. After dicing and polishing, the waveguide can be butt-jointed with an optical fiber, and the loss is estimated as 0.1 dB/mm. A resonator with Q = 11,700 is also demonstrated. Recent progress and the future outlooks for the technology are also discussed.
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U2 - 10.1117/1.1695407
DO - 10.1117/1.1695407
M3 - Article
AN - SCOPUS:3142764006
VL - 43
SP - 1022
EP - 1029
JO - SPIE J
JF - SPIE J
SN - 0091-3286
IS - 5
ER -