Wafer-to-wafer transfer process of barium strontium titanate for frequency tuning applications using laser pre-irradiation

Tetuo Samoto, Hideki Hirano, Toshihiro Somekawa, Kousuke Hikichi, Masayuki Fujita, Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science