Wafer-level heterointegration technologies for MEMS-based communication devices

Shuji Tanaka, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)
Original languageEnglish
Publication statusPublished - 2010
EventSystems Integration 2010 - 4th European Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components - Como, Italy
Duration: 2010 Mar 232010 Mar 24

Other

OtherSystems Integration 2010 - 4th European Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components
CountryItaly
CityComo
Period10/3/2310/3/24

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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