Visualizing patterned thin films by grazing-incidence small-angle X-ray scattering coupled with computed tomography

Hiroki Ogawa, Yukihiro Nishikawa, Akihiko Fujiwara, Mikihito Takenaka, Yi Chin Wang, Toshiji Kanaya, Masaki Takata

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Images of the spatial distribution of nanostructures in thin films were successfully reconstructed by grazing-incidence small-angle X-ray scattering (GISAXS) coupled with computed tomography (CT) measurements. As a model sample of inhomogeneous thin films, a thin film was patterned with four characters (F, B, S and L) consisting of nanoparticles of gold (Au), platinum (Pt), Au/Pt and Pt/Au, respectively, on a silicon substrate. The characters each produced respective two-dimensional GISAXS images which reflect the nanoparticle structures and their correlations in the thin film. The application of the GISAXS-CT technique to the characteristic scattering GISAXS intensity of each component enables one to reconstruct the images of each character independently. Moreover, it was found that the patterned images could be reconstructed even from very weak scattered intensities at higher q positions and the diffuse intensities. These results indicate that the GISAXS-CT method is a powerful tool to obtain distinct reconstruction images detailing the particle size, shape and surface roughness.

Original languageEnglish
Pages (from-to)1645-1650
Number of pages6
JournalJournal of Applied Crystallography
Volume48
DOIs
Publication statusPublished - 2015

Keywords

  • Grazing-incidence small-angle scattering
  • X-ray tomography
  • diffuse scattering
  • surface structure

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology(all)

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