Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry

Ken Nakano; Akihiro Torii; Kazuhiro Hane; Shigeru Okuma

doi:10.1117/12.284553

Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry

Ken Nakano, Akihiro Torii, Kazuhiro Hane, Shigeru Okuma

ENG - Finemechanics

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

A stroboscopic phase-shift interferometry is applied to visualize the high-frequency microvibration of a surface acoustic wave (SAW) devices quantitatively. The Fizeau-Type interferometry is realized with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Distribution of the 50 MHz SAW propagation along the propagation path has been observed. The measured amplitude of the vibration is 3 nm(p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. This method is useful for estimating and improving performances of microdevices.

Original language	English
Pages (from-to)	44-54
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3225
DOIs	https://doi.org/10.1117/12.284553
Publication status	Published - 1997 Sep 2
Event	Microlithography and Metrology in Micromachining III 1997 - Austin, United States Duration: 1997 Sep 29 → 1997 Sep 30

Keywords

Multi-mode laser
Phase-shift interferometry
Stroboscopic method
Surface acoustic wave
Surface acoustic wave device
Vibration distribution measurement

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry",

abstract = "A stroboscopic phase-shift interferometry is applied to visualize the high-frequency microvibration of a surface acoustic wave (SAW) devices quantitatively. The Fizeau-Type interferometry is realized with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Distribution of the 50 MHz SAW propagation along the propagation path has been observed. The measured amplitude of the vibration is 3 nm(p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. This method is useful for estimating and improving performances of microdevices.",

keywords = "Multi-mode laser, Phase-shift interferometry, Stroboscopic method, Surface acoustic wave, Surface acoustic wave device, Vibration distribution measurement",

author = "Ken Nakano and Akihiro Torii and Kazuhiro Hane and Shigeru Okuma",

year = "1997",

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T1 - Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry

AU - Nakano, Ken

AU - Torii, Akihiro

AU - Hane, Kazuhiro

AU - Okuma, Shigeru

PY - 1997/9/2

Y1 - 1997/9/2

N2 - A stroboscopic phase-shift interferometry is applied to visualize the high-frequency microvibration of a surface acoustic wave (SAW) devices quantitatively. The Fizeau-Type interferometry is realized with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Distribution of the 50 MHz SAW propagation along the propagation path has been observed. The measured amplitude of the vibration is 3 nm(p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. This method is useful for estimating and improving performances of microdevices.

AB - A stroboscopic phase-shift interferometry is applied to visualize the high-frequency microvibration of a surface acoustic wave (SAW) devices quantitatively. The Fizeau-Type interferometry is realized with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Distribution of the 50 MHz SAW propagation along the propagation path has been observed. The measured amplitude of the vibration is 3 nm(p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. This method is useful for estimating and improving performances of microdevices.

KW - Multi-mode laser

KW - Phase-shift interferometry

KW - Stroboscopic method

KW - Surface acoustic wave

KW - Surface acoustic wave device

KW - Vibration distribution measurement

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T2 - Microlithography and Metrology in Micromachining III 1997

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