Abstract
A stroboscopic phase-shift interferometry is applied to visualize the high-frequency microvibration of a surface acoustic wave (SAW) devices quantitatively. The Fizeau-Type interferometry is realized with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Distribution of the 50 MHz SAW propagation along the propagation path has been observed. The measured amplitude of the vibration is 3 nm(p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. This method is useful for estimating and improving performances of microdevices.
| Original language | English |
|---|---|
| Pages (from-to) | 44-54 |
| Number of pages | 11 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3225 |
| DOIs | |
| Publication status | Published - 1997 Sep 2 |
| Event | Microlithography and Metrology in Micromachining III 1997 - Austin, United States Duration: 1997 Sep 29 → 1997 Sep 30 |
Keywords
- Multi-mode laser
- Phase-shift interferometry
- Stroboscopic method
- Surface acoustic wave
- Surface acoustic wave device
- Vibration distribution measurement
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering