Visualization of high-frequency surface acoustic wave propagation using stroboscopic phase-shift interferometry

Ken Nakano, Akihiro Torii, Kazuhiro Hane, Shigeru Okuma

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

A stroboscopic phase-shift interferometry is applied to visualize the high-frequency microvibration of a surface acoustic wave (SAW) devices quantitatively. The Fizeau-Type interferometry is realized with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Distribution of the 50 MHz SAW propagation along the propagation path has been observed. The measured amplitude of the vibration is 3 nm(p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. This method is useful for estimating and improving performances of microdevices.

Original languageEnglish
Pages (from-to)44-54
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3225
DOIs
Publication statusPublished - 1997 Sep 2
EventMicrolithography and Metrology in Micromachining III 1997 - Austin, United States
Duration: 1997 Sep 291997 Sep 30

Keywords

  • Multi-mode laser
  • Phase-shift interferometry
  • Stroboscopic method
  • Surface acoustic wave
  • Surface acoustic wave device
  • Vibration distribution measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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