Visualization of 50 MHz surface acoustic wave propagation using stroboscopic phase-shift interferometry

Ken Nakano, Kazuhiro Hane, Shigeru Okuma, Tadashi Eguchi

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

A stroboscopic phase-shift interferometry has been developed to visualize surface acoustic wave (SAW) propagation on SAW devices quantitatively. The developed interferometry is a Fizeau-type one with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Fifty MHz SAW propagation on the surface of the SAW device has been measured with the interferometry. Distribution of the SAW along the propagation path has been observed, whose amplitude is 3 nm (p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. The system is useful for estimating and improving performances of micro-devices.

Original languageEnglish
Pages (from-to)265-269
Number of pages5
JournalOptical Review
Volume4
Issue number2
DOIs
Publication statusPublished - 1997 Jan 1

Keywords

  • Laser
  • Phase-shift interferometry
  • Stroboscopic method
  • Surface acoustic wave
  • Surface acoustic wave device
  • Vibration measurement

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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