Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co35.6Fe50B14.4)-(SiO2) thin films

M. Munakata, Mashio Motoyama, M. Yagi, T. Ito, Y. Shimada, Masahiro Yamaguchi, Ken Ichi Arai

Research output: Contribution to journalConference articlepeer-review

22 Citations (Scopus)

Abstract

Co3506Fe50B14.4)-(SiO2) soft magnetic films with electrical resistivity of over 10 000 μ Ω · cm (1 × 10-4 Ωm) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115 600 μ Ω · cm (1.156 × 10-3 Ωm) was obtained with a large uniaxal anisotropy field Hk of about 250 Oe, a hard axis coercivity Hch of 5.6 Oe, and a saturated magnetization 4π Ms of 8.3 kG. The real part of the relative permeability μr' was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10 000 μ Ω · cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.

Original languageEnglish
Pages (from-to)3147-3149
Number of pages3
JournalIEEE Transactions on Magnetics
Volume38
Issue number5 I
DOIs
Publication statusPublished - 2002 Sep 1
Event2002 International Magnetics Conference (Intermag 2002) - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

Keywords

  • CoFeB)-(SiO) films
  • Gigahertz range
  • Heteroamorphous structure
  • High resistiviy
  • Soft magnetism

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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