Vertex Channel Array Transistor (VCAT) featuring sub-60nm high performance and highly manufacturable trench capacitor DRAM

M. Kito, R. Katsumata, M. Kondo, S. Ito, K. Miyano, M. Kido, H. Yasutake, Y. Nagata, N. Aoki, H. Aochi, Akihiro Nitayama

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science