Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We present a varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer. The varifocal scanning micro-mirror consists of a varifocal membrane mirror with a rotational scanning function. The scanner and varifocal mirror are driven by the comb and parallel plate electrostatic actuators, respectively. The mirror rotates 5 degrees at 45V. And the varifocal mirror changes the curvature from 2m-1 (focal length 128mm) to +2.7m-1 (focal length +93mm) by applying the voltage from 0V to 50V. The laser beam was incident on the varifocal scanning micro-mirror and it is conformed that the lateral position and spot size of the reflected laser beam is changed simultaneously.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages570-573
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • Scanning micro-mirror
  • Silicon-on-insulator wafer
  • Varifocal mirror

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Sasaki, T., & Hane, K. (2011). Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 570-573). [5969716] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969716