Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer

Takashi Sasaki; Kazuhiro Hane

doi:10.1109/JMEMS.2012.2189936

Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer

Takashi Sasaki, Kazuhiro Hane

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning function. The scanner and varifocal mirror are driven by comb and parallel-plate electrostatic actuators, respectively. The mirror rotates 5.5 ^° at 45 V in static mode. The curvature of the varifocal mirror is changed from-4 m ^-1 (-128-mm focal length) to m ^-1 (mm focal length) by applying a voltage from 0 to 50 V. It is confirmed that the lateral position and spot size of the reflected laser beam from the varifocal scanning micromirror are changed simultaneously. Moreover, confocal sensing is demonstrated using a fiber-optic system with the proposed mirror.

Original language	English
Article number	6176183
Pages (from-to)	971-980
Number of pages	10
Journal	Journal of Microelectromechanical Systems
Volume	21
Issue number	4
DOIs	https://doi.org/10.1109/JMEMS.2012.2189936
Publication status	Published - 2012

Keywords

Comb-drive actuator
confocal microscope
electrostatic actuator
micromirror
scanner
silicon on insulator (SOI)
varifocal mirror

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2012.2189936

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title = "Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer",

abstract = "We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning function. The scanner and varifocal mirror are driven by comb and parallel-plate electrostatic actuators, respectively. The mirror rotates 5.5 ° at 45 V in static mode. The curvature of the varifocal mirror is changed from-4 m -1 (-128-mm focal length) to m -1 (mm focal length) by applying a voltage from 0 to 50 V. It is confirmed that the lateral position and spot size of the reflected laser beam from the varifocal scanning micromirror are changed simultaneously. Moreover, confocal sensing is demonstrated using a fiber-optic system with the proposed mirror.",

keywords = "Comb-drive actuator, confocal microscope, electrostatic actuator, micromirror, scanner, silicon on insulator (SOI), varifocal mirror",

author = "Takashi Sasaki and Kazuhiro Hane",

note = "Funding Information: Manuscript received October 22, 2011; revised January 3, 2012; accepted February 13, 2012. Date of publication April 3, 2012; date of current version July 27, 2012. This work was supported in part by the Japan Society for the Promotion of Science. Subject Editor H. Zappe.",

year = "2012",

doi = "10.1109/JMEMS.2012.2189936",

language = "English",

volume = "21",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

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AU - Sasaki, Takashi

AU - Hane, Kazuhiro

N1 - Funding Information: Manuscript received October 22, 2011; revised January 3, 2012; accepted February 13, 2012. Date of publication April 3, 2012; date of current version July 27, 2012. This work was supported in part by the Japan Society for the Promotion of Science. Subject Editor H. Zappe.

PY - 2012

Y1 - 2012

N2 - We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning function. The scanner and varifocal mirror are driven by comb and parallel-plate electrostatic actuators, respectively. The mirror rotates 5.5 ° at 45 V in static mode. The curvature of the varifocal mirror is changed from-4 m -1 (-128-mm focal length) to m -1 (mm focal length) by applying a voltage from 0 to 50 V. It is confirmed that the lateral position and spot size of the reflected laser beam from the varifocal scanning micromirror are changed simultaneously. Moreover, confocal sensing is demonstrated using a fiber-optic system with the proposed mirror.

AB - We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning function. The scanner and varifocal mirror are driven by comb and parallel-plate electrostatic actuators, respectively. The mirror rotates 5.5 ° at 45 V in static mode. The curvature of the varifocal mirror is changed from-4 m -1 (-128-mm focal length) to m -1 (mm focal length) by applying a voltage from 0 to 50 V. It is confirmed that the lateral position and spot size of the reflected laser beam from the varifocal scanning micromirror are changed simultaneously. Moreover, confocal sensing is demonstrated using a fiber-optic system with the proposed mirror.

KW - Comb-drive actuator

KW - confocal microscope

KW - electrostatic actuator

KW - micromirror

KW - scanner

KW - silicon on insulator (SOI)

KW - varifocal mirror

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Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer

Abstract

Keywords

ASJC Scopus subject areas

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