Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer

Takashi Sasaki, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Abstract

We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning function. The scanner and varifocal mirror are driven by comb and parallel-plate electrostatic actuators, respectively. The mirror rotates 5.5 ° at 45 V in static mode. The curvature of the varifocal mirror is changed from-4 m -1 (-128-mm focal length) to m -1 (mm focal length) by applying a voltage from 0 to 50 V. It is confirmed that the lateral position and spot size of the reflected laser beam from the varifocal scanning micromirror are changed simultaneously. Moreover, confocal sensing is demonstrated using a fiber-optic system with the proposed mirror.

Original languageEnglish
Article number6176183
Pages (from-to)971-980
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume21
Issue number4
DOIs
Publication statusPublished - 2012

Keywords

  • Comb-drive actuator
  • confocal microscope
  • electrostatic actuator
  • micromirror
  • scanner
  • silicon on insulator (SOI)
  • varifocal mirror

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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