Abstract
We present a varifocal scanning micromirror fabricated from a silicon-on-insulator wafer. The varifocal scanning micromirror consists of a varifocal mirror with a rotational scanning function. The scanner and varifocal mirror are driven by comb and parallel-plate electrostatic actuators, respectively. The mirror rotates 5.5 ° at 45 V in static mode. The curvature of the varifocal mirror is changed from-4 m -1 (-128-mm focal length) to m -1 (mm focal length) by applying a voltage from 0 to 50 V. It is confirmed that the lateral position and spot size of the reflected laser beam from the varifocal scanning micromirror are changed simultaneously. Moreover, confocal sensing is demonstrated using a fiber-optic system with the proposed mirror.
Original language | English |
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Article number | 6176183 |
Pages (from-to) | 971-980 |
Number of pages | 10 |
Journal | Journal of Microelectromechanical Systems |
Volume | 21 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2012 |
Keywords
- Comb-drive actuator
- confocal microscope
- electrostatic actuator
- micromirror
- scanner
- silicon on insulator (SOI)
- varifocal mirror
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering