Abstract
An aspheric wave-front recording system was designed to produce a holographic grating for use in a standard soft X-ray flat-field spectrograph interchangeably with a mechanically ruled varied-line-spacing (VLS) grating. The grating grooves recorded with the designed aspheric wave-front recording system were processed to form a laminar groove profile by means of reactive ion etching. Measurements done with synchrotron radiation and a laboratory X-ray source are reported for this laminar-type grating and a commercial grating replicated from a mechanically ruled VLS grating that was specifically designed and fabricated for the standard soft X-ray flat-field spectrograph. The laminar-type holographic grating is found to have an absolute first-order efficiency of approximately 10% for wavelengths of approximately 4.5-12 nm. It is also shown that the holographic grating is effective in suppressing the higher orders and stray-light level for soft X-ray of 4.36 nm (C-K) and has a comparable spectral resolution to the replica VLS grating.
| Original language | English |
|---|---|
| Pages (from-to) | 163-170 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4146 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2000 Nov 8 |
Keywords
- Diffraction grating
- Spectrometer
- diffraction efficiency
- flat-field spectrograph
- holographic grating
- soft X-ray
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering