Variation of optical properties by the crystalline phase transition of polycrystalline silicon

Hidenori Iwata, Tomohiro Kita, Hirohito Yamada

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We studied a characteristics trimming technique in Si photonic-wire waveguide devices. In order to trimming device properties, we utilized refractive index change of amorphous silicon when it crystallizes by annealing. We fabricated MZI devices with amorphous silicon waveguides, and demonstrated the trimming of the transmission spectra by thermal annealing and also laser annealing after finished the device fabrication process. We observed 5.2 % of the refractive index change owing to crystallization by annealing in a nitrogen atmosphere and 5.8% of change by laser crystallization.

Original languageEnglish
Title of host publicationSilicon Photonics VI
Publication statusPublished - 2011 Apr 11
EventSilicon Photonics VI - San Francisco, CA, United States
Duration: 2011 Jan 232011 Jan 26


OtherSilicon Photonics VI
Country/TerritoryUnited States
CitySan Francisco, CA


  • Amorphous silicon
  • Laser annealing
  • Polycrystalline silicon
  • Silicon photonic-wire waveguide

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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