Variation analysis of TiN FinFETs

K. Endo, T. Matsukawa, Y. Ishikawa, Y. X. Liu, S. O'uchi, K. Sakamoto, J. Tsukada, H. Yamauchi, M. Masahara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)
Original languageEnglish
Title of host publication2009 International Semiconductor Device Research Symposium, ISDRS '09
DOIs
Publication statusPublished - 2009 Dec 1
Externally publishedYes
Event2009 International Semiconductor Device Research Symposium, ISDRS '09 - College Park, MD, United States
Duration: 2009 Dec 92009 Dec 11

Publication series

Name2009 International Semiconductor Device Research Symposium, ISDRS '09

Other

Other2009 International Semiconductor Device Research Symposium, ISDRS '09
CountryUnited States
CityCollege Park, MD
Period09/12/909/12/11

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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