Variability origins of parasitic resistance in finFETs with silicided source/drain

Takashi Matsukawa, Yongxun Liu, Kazuhiko Endo, Junichi Tsukada, Yuki Ishikawa, Hiromi Yamauchi, Shinichi O'Uchi, Kunihiro Sakamoto, Meishoku Masahara

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Variability origins of parasitic resistance in finFETs with silicided source/drain'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science